Masato Sone
Tokyo Institute of Technology, Japan
Biography
Masato Sone completed his doctor degree of engineering at the age of 28 years old at Tokyo Institute of Technology. He worked as a researcher in Nippon Oil Company from 1996-2000. He was an assistant professor and then a research associate professor at Tokyo University of Agriculture & Technology from 2000 to 2005, and he got the position of associate professor at Tokyo Institute of Technology from 2005 until present time. He has published more than 110 papers in scientific journals. His majorities are microelectronics, surface finishing, chemical engineering, liquid crystal and polymer science. His recent topic has been novel nano wiring process using supercritical carbon dioxide for integrated circuit technology.
Abstract
Abstract : Integration of biocompatible MEMS by gold electrodeposition using supercritical carbon dioxide
